• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention is an air filter comprising a nonwoven fabric made of polyolefin fibers or polyester fibers or a laminate of a composite of the nonwoven fabric and a PTFE porous membrane, wherein the total amount of gas produced therefrom is 20 µg / g or less as analyzed by gas chromatography. It relates to an air filter. The total amount of gas produced from the air filter is greatly reduced by heat treatment for 5 to 20 minutes at a temperature of 80 to 130 ° C. before or after the nonwoven is laminated to the PTFE porous membrane.
    公开号:KR19990029400A
    申请号:KR1019980035804
    申请日:1998-09-01
    公开日:1999-04-26
    发明作者:다쿠야 마에오카；노리카네 나바타；도시아키 이시노
    申请人:야마모토 히데키；닛토덴코 가부시키가이샤；
    IPC主号:
    专利说明:

    Air filter and its manufacturing method
    The present invention relates to an air filter having a low degassing (gas generation) property using a polytetrafluoroethylene (PTFE) porous membrane, and a method of manufacturing the same. It has excellent performance without problems causing (ie gas generation).
    Until now, filter materials prepared by processing glass fibers made by adding a binder to glass fibers with paper machines have been frequently used as materials for air filters for clean rooms. However, there are various problems with this material. For example, the presence of small fibers attached to the filter material, an increase in pressure loss when the binder is increased to prevent self-dust generation when fabricating or bending the filter material (JP-A 63-16019). (The term JP-A as used herein means a Japanese patent publication unexamined). In addition, in the filter material, there is a problem in that when the filter material is contacted with a chemical such as hydrofluoric acid, the glass and the binder may be weakened and cause dust formation.
    In order to solve this problem, recently, PTFE porous membranes have been used in various fields as filter materials for filters. As described in JP-A 59-152825, 3-2215141, 5-202217 and 7-196831, and PCT WO 94/16802, PTFE membranes are used for stringent cleanliness, such as semiconductor manufacturing. It is useful as a filter material for filters used in fields requiring an environment.
    Since these useful PTFE porous membranes themselves are of low strength, they are laminated with nonwovens or woven fabrics of polyethylene, polyester or the like as reinforcements to enhance their strength and folding workability.
    However, although PTFE is a cleaning material, from 2,6-di-tert-butyl-p-cresol (BHT), which is known to adversely affect products in the semiconductor manufacturing field that requires a strict clean environment from nonwovens laminated as reinforcements. ), Gas such as dibutyl phthalate (DBP) leaks.
    The present invention has been made to solve the above problem.
    According to a first aspect of the present invention, an air filter comprising a nonwoven fabric composed of fibers containing at least one component selected from polyolefins and polyesters as a main component, or a composite composed of the nonwoven fabric and a polytetrafluoroethylene porous membrane As an example, the total amount of gas produced therefrom is quantitatively analyzed by gas chromatography to provide an air filter having 20 μg / g or less.
    Moreover, in the air filter of this invention, it is preferable to heat-process a nonwoven fabric.
    According to a second aspect of the present invention, a nonwoven fabric composed of fibers containing at least one component selected from polyolefins and polyesters as a main component or a composite of the nonwoven fabric is heat treated at a temperature of 80 to 130 ° C. for 5 to 20 minutes, and then heat treated. A method of making an air filter, comprising laminating a nonwoven fabric or composite thereof with a polytetrafluoroethylene membrane.
    Further, according to the third aspect of the present invention, a nonwoven or nonwoven composite composed of fibers containing at least one component selected from polyolefins and polyesters as a main component and a polytetrafluoroethylene porous membrane are laminated, and then the resulting laminate is laminated. It provides a method for producing an air filter, including the heat treatment for 5 to 20 minutes at a temperature of 80 to 130 ℃.
    In the following, the present invention is described in detail.
    In the air filter of the present invention, when the nonwoven fabric is composed of fibers containing at least one component selected from polyolefin and polyester as a main component or a nonwoven fabric composed of a composite of the nonwoven fabric, there is no particular limitation on the nonwoven fabric used as the reinforcing material. Commercially available products may be used.
    Polyolefins used in the present invention include polyethylene (PE), polypropylene (PP) and the like, and polyesters used in the present invention include polyethylene terephthalate (PET) and the like.
    The composite nonwoven fabric used in the present invention is, for example, a composite fiber of a core / sheath structure, for example, a composite nonwoven fabric and a low melting point material whose core component is composed of synthetic fibers having a relatively higher melting point than the sheath component. And a non-woven bilayer made of a high melting point material, and a composite nonwoven fabric prepared by fusing a powder of a low melting point material to a surface of a nonwoven made of a high melting point material. Commercially available composite nonwovens can be used in the present invention, examples of which include ELEVES T0153WDC (trade name, manufacturer; UNITIKA LTD., Composite nonwoven fabric of core / shield structure composed of PE and PET), Syntex R- 250 (trade name, manufacturer; MITSUI PETROCHEMICAL INDUSTRIES, LTD., Composite nonwoven fabric consisting of PET) and TAPYRUS SN32ESB-SHP10 (trade name, manufacturer; Tonen Tapyrus KK, composite nonwoven fabric made by fusing PE powder to PET nonwoven fabric There is).
    In the air filter of the present invention, the PTFE porous membrane can be produced, for example, by the following method.
    First, a fine powder of PTFE is mixed with a liquid lubricant, and the resulting mixture is molded into a sheet by one or more of an extrusion method and a rolling method without sintering to obtain a sheet-shaped molded product.
    There is no particular limitation on the above PTFE fine powder, and a commercial item may be used. Examples of commercially available products include polyflon F-104 (trade name, manufacturer; DAIKIN INDUSTRIES, LTD.), Fluon CD-123 (trade name, manufacturer; Asahi ICI Fluoropolymers KK), and Teflon 6J ( Trade name, manufacturer; DU PONT-MITSUI FLUOROCHEMICALS CO., LTD.
    In addition, any liquid lubricant can be used in the present invention as long as the lubricant can wet the surface of the fine powder of PTFE and can be removed by a method such as evaporation or compression after obtaining the sheet-shaped molded article. Examples of liquid lubricants include hydrocarbon oils such as liquid paraffin, naphtha, white oils, toluene, xylene and the like; Alcohols, ketones, esters and mixtures of two or more thereof.
    The amount of the liquid lubricant added to the fine powder of PTFE can be appropriately selected depending on the type of the PTFE fine powder and the liquid lubricant and the molding method for obtaining the sheet-shaped molded product, but the amount of the liquid lubricant is usually 5 per 100 parts by weight of the fine powder of PTFE. To 50 parts by weight.
    An example of a method of forming a mixture of PTFE fine powder and a liquid lubricant into a sheet form by at least one of a compression method and a rolling method is to extrude a mixture of the PTFE fine powder and the liquid lubricant in the form of a rod into a pair of rolls. There is a method comprising rolling in the form of a sheet and a method comprising extruding the mixture into a flat plate to form a sheet thereof. The thickness of the sheet-like molded article thus obtained is usually 0.05 to 0.5 mm.
    Thereafter, the liquid lubricant contained in the sheet-shaped molded article is removed. Removal of the liquid lubricant is carried out by heating, extrusion, or a combination of these methods.
    Finally, the sheet-shaped molded article from which the liquid lubricant has been removed is stretched in at least one axial direction to make the molded article porous. There is no restriction on the stretching temperature and the elongation rate.
    The manufacturing method of the air filter which concerns on this invention has the characteristic of performing heat processing in manufacturing a filter by laminating | stacking a nonwoven fabric and said PTFE porous membrane. The heat treatment may be performed before or after laminating the nonwoven fabric and the PTFE porous membrane.
    If the heat treatment method is a method capable of heat treatment of the nonwoven fabric or PTFE porous membrane at a temperature of 80 to 130 ℃ for 5 to 20 minutes, there is no limitation. However, it is desirable to pass the nonwoven or PTFE porous membrane air filter through the interior of the furnace while fixing both ends of the nonwoven or air filter and to move the nonwoven or PTFE porous membrane air filter along the heated roll. This is because thermal stress is unlikely to occur in this method.
    As a method of laminating the nonwoven fabric and the PTFE porous membrane, there is a method of spray coating the adhesive onto the nonwoven fabric and laminating the nonwoven fabric with the PTFE porous membrane, and a method of heating and laminating them, but is not limited thereto.
    In the following, the present invention is explained substantially by the following examples.
    In addition, the quantitative analysis of the gas (DBP, BHT, hydrocarbon, toluene, etc.) generated in the embodiment is purge trap type Curie Point Headspacer sampler (trade name; JHS-100A, The gas produced using Nippon Bunseki Kogyo KK (manufactured by Nippon Bunseki Kogyo KK) is performed by introducing into analytical GC (trade name; GC-17A, manufactured by SHIMADZU CORPORATION). Measurement conditions are as follows.
    Condition of headspace sampling inspection device
    1st desorption temperature: 120 degreeC x 20 minutes
    2nd adsorption temperature: -40 degreeC
    2nd desorption temperature: 358 ° C x 30 seconds
    GC measurement conditions
    Column: UA-1 0.25 mmØ × 30 m, df = 0.25 μm
    Detector: FID
    Column temperature: 45 ° C (3 minutes) → 10 ° C / min → 260 ° C (3 minutes)
    Carrier gas: helium
    Example 1
    Four edges of each of the Elibs T0153WDO (trade name; UNITIKA LTD.) And Tapyrus SN32ESB-SHP10 (trade name; Tonen Tapyrus KK) are fixed with a metal frame and used for 20 minutes in an oven with an air temperature of 80 ° C. It is left to heat treatment.
    Thereafter, 100 parts by weight of PTFE fine powder (Fluon CD-123, trade name, manufacturer; Asahi ICI Fluoropolymers K.K.) and 30 parts by weight of a liquid lubricant (liquid paraffin) are uniformly mixed. The resulting mixture is preformed under the conditions of 20 kg / cm 2, and then extruded in the form of a rod, and the rod-shaped product is passed between a pair of rolling rolls made of metal to obtain a long sheet-shaped molded article having a thickness of 0.2 mm. Thereafter, the liquid lubricant is removed from the sheet-shaped molded article by extrusion using Triclene, and the sheet-shaped molded article is wound in a cylindrical core in roll form.
    The sheet-like molded article is stretched 30 times in the longitudinal direction at 370 ° C. by the roll stretching method. Thereafter, the sheet-like PTFE molded article was stretched nine times in a transverse direction at 100 ° C. using a tenter to obtain a sintered PTFE porous membrane. A PTFE porous membrane is laminated to the heat treated nonwoven by thermal lamination to sandwich the PTFE porous membrane between the nonwovens.
    For the PTFE porous membrane air filter obtained as above, the produced gas is quantitatively analyzed. The results are shown in Table 1 below.
    Amount of gas produced (μg / g)BHTDBPgun Example 1--4
    Example 2
    The PTFE porous membrane prepared in Example 1 was laminated to untreated heat-treated Elves T0153WDO (manufactured by UNITIKA LTD.) And Tapyrus SN32ESB-SHP10 (manufactured by Tonen Tapyrus KK) to thermally laminate the PTFE porous membrane between nonwoven fabrics. All.
    The four edges of the PTFE porous membrane air filter are fixed with a metal frame, the air filter is left to heat in an oven at 120 ° C. for 5 minutes to heat treatment and the resulting gas is quantified. The results are shown in Table 2 below.
    Amount of gas produced (μg / g)BHTDBPgun Example 2--6
    Comparative Example 1
    The PTFE porous membrane of the sintered state prepared in Example 1 was laminated on untreated heat-treated Elves T0153WDO (manufactured by UNITIKA LTD.) And Tapyrus SN32ESB-SHP10 (manufactured by Tonen Tapyrus KK) by thermal lamination. Sandwiched between.
    For the PTFE porous membrane air filter obtained as above, the produced gas is quantitatively analyzed. The results are shown in Table 3 below.
    Amount of gas produced (μg / g)BHTDBPgun Comparative Example 13.50.1529
    As evidenced by the results presented in Tables 1 to 3, PTFE porous membrane air with less amount of gas produced in comparison with Comparative Example 1 without heat treatment in Examples 1 and 2 with heat treatment It can be seen that a filter is obtained.
    As mentioned earlier, PTFE porous membrane air filters with excellent properties that do not cause the problem of generating harmful gases such as BHT and DBP are either nonwoven fabrics composed of fibers containing as the main component one or more components selected from polyolefins and polyesters or The composite of the nonwoven fabric may be provided by heat treatment at a temperature of 80 to 130 ° C. for 5 to 20 minutes to laminate with a PTFE porous membrane or by heat treatment after lamination according to the present invention.
    Although the present invention has been described in detail with reference to specific embodiments thereof, it will be apparent to those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention.
    According to the present invention, a nonwoven fabric composed of a fiber containing at least one component selected from polyolefin and polyester as a main component, or a composite of the nonwoven fabric is laminated with a PTFE porous membrane, wherein 5 minutes to 20 minutes at a temperature of 80 ° C to 130 ° C. By carrying out the heat treatment for minutes before or after lamination, a PTFE porous membrane air filter material having excellent performance without degassing problems can be produced.
    权利要求:
    Claims (4)
    [1" claim-type="Currently amended] An air filter comprising a nonwoven fabric composed of fibers containing at least one component selected from polyolefins and polyesters as a main component, or a laminate of a composite composed of the nonwoven fabric and a polytetrafluoroethylene porous membrane, the resulting filter comprising An air filter having a total gas amount of 20 µg / g or less by quantitative analysis by gas chromatography.
    [2" claim-type="Currently amended] 2. The air filter of claim 1, wherein the nonwoven fabric or composite thereof is heat treated.
    [3" claim-type="Currently amended] A nonwoven fabric composed of fibers containing at least one component selected from polyolefins and polyesters as a main component or a composite of the nonwoven fabric is heat treated at a temperature of 80 to 130 ° C. for 5 to 20 minutes, and then the heat treated nonwoven fabric or a composite material thereof is polytetrafluoro A method of manufacturing an air filter, comprising laminating with a low ethylene porous membrane.
    [4" claim-type="Currently amended] A nonwoven fabric composed of fibers containing at least one component selected from polyolefins and polyesters as a main component or a composite of the nonwoven fabric and a polytetrafluoroethylene porous membrane was laminated, and the resulting laminate was then subjected to a temperature of 5 to 20 at a temperature of 80 to 130 ° C. A method of making an air filter, comprising the heat treatment for minutes.
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    同族专利:
    公开号 | 公开日
    US20020177381A1|2002-11-28|
    US6030484A|2000-02-29|
    DE19839576A1|1999-03-04|
    JPH11137931A|1999-05-25|
    KR100424968B1|2004-06-05|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1997-09-02|Priority to JP97-236898
    1997-09-02|Priority to JP23689897
    1998-04-27|Priority to JP98-117517
    1998-04-27|Priority to JP11751798A
    1998-09-01|Application filed by 야마모토 히데키, 닛토덴코 가부시키가이샤
    1999-04-26|Publication of KR19990029400A
    2004-06-05|Application granted
    2004-06-05|Publication of KR100424968B1
    优先权:
    申请号 | 申请日 | 专利标题
    JP97-236898|1997-09-02|
    JP23689897|1997-09-02|
    JP98-117517|1998-04-27|
    JP11751798A|JPH11137931A|1997-09-02|1998-04-27|Air filter and its production|
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